000 00974pam a2200253 a 4500
999 _c60443
_d60443
001 517128
003 FUTML
005 20170420094126.0
007 ta
008 860812s1988 maua b 001 0 eng
010 _a 86022128
020 _a0201146959 :
_c$15.95
037 _aB-13088
040 _aDLC
_cFUTML
_dDLC
_beng
050 0 0 _aTK7874
_b.J33 1988
100 1 _aJaeger, Richard C.
_97198
245 1 0 _aIntroduction to microelectronic fabrication /
_c by Richard C. Jaeger.-
260 _aReading, Mass. :
_bAddison-Wesley Pub. Co.,
_cc1988.
300 _axiii, 232 p. :
_bill. ;
_c24 cm.
440 0 _aModular series on solid state devices ;
_vv. 5
_912761
504 _aIncludes bibliographical references and index.
590 _aB-13088/KOLO/20/04/17
650 0 _aIntegrated circuits
_xVery large scale integration
_xDesign and construction
_vTextbooks.
_912762
906 _a7
_bcbc
_corignew
_d1
_eocip
_f19
_gy-gencatlg
912 _aM. Kolo
_bM. Kolo
_cAbu
942 _2lcc
_cBKS
949 _aIBB Library Gidan Kwano
_cTK 7874. J33
_d.J33
_g2342110666
_nnc1