000 nam a22 7a 4500
999 _c59589
_d59589
001 78603
003 FUTML
005 20170418083003.0
007 ta
008 170418c19891982nyu b 00110 eng
010 _a 88032022
020 _a0070193398
035 _a(OCoLC)18714879
035 _a18714879
040 _aFUTML
_cFUTML
_bENG
_dFUTML
050 0 0 _aTK7874
_b.E44 1989
100 1 0 _aElliott, D. J.
_910714
245 1 0 _aIntegrated circuit fabrication technology / by
_cDavid J. Elliott.
_h print resource
250 _a2nd ed.
260 0 _aNew York :
_bMcGraw-Hill,
_c1989.
300 _axvi, 540 p. :
_bill. ;
_c24 cm.
504 _aIncludes bibliographies and index.
650 0 _aIntegrated circuits
_xDesign and construction.
_97228
942 _2lcc
_cBKS