000			nam a22 7a 4500
999			_c57973 _d57973
001			2406780
003			FUTML
005			20170405105904.0
007			ta
008			050417s1987 paua grb 101 0 eng d
010			_a 86028761
020			_a0803104596
037			_aB-12035
040			_aDLC _cFUTML _dDLC _beng
050	0	0	_aTK7871.85 _b.E47 1987
082	0	0	_219
245	0	0	_aEmerging semiconductor technology : _ba symposium / _csponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors.
260			_aPhiladelphia, PA : _bAmerican Society for Testing and Materials, _cc1987.
300			_a704 p. : _bill. ; _c24 cm.
440		0	_aASTM special technical publication ; _v960 _93356
500			_aPapers presented at the Fourth International Symposium on Semiconductor Processing.
500			_a"ASTM publication code number (PCN) 04-960000-46."
504			_aIncludes bibliographies and indexes.
590			_aB-12035/KOLO/05/04/17
650		0	_aSemiconductor industry _xCongresses. _96659
650		0	_aSemiconductors _xDesign and construction _xCongresses. _96660
700	1		_aGupta, D. C. _q(Dinesh C.) _96661
700	1		_aLanger, Paul H. _96662
710	2		_aASTM Committee F-1 on Electronics. _96663
711	2		_aSymposium on Semiconductor Processing _n(4th : _d1986 : _cSan Jose, Calif.) _96664
906			_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg
912			_aM. Kolo _bM. Kolo _cAbu, A A
942			_2lcc _cBKS
949			_aIBB Library Gidan Kwano _cTK 7871.85.E47 1987 _d.E47 _g2342105376 _nnc1