Jaeger, Richard C. <br/><br/>
Introduction to microelectronic fabrication / 
by Richard C. Jaeger.- 
 - Reading, Mass. :  Addison-Wesley Pub. Co.,  c1988. 
 - xiii, 232 p. :  ill. ;  24 cm. 
 - Modular series on solid state devices ;  v. 5 .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0201146959 :  $15.95 
<br/><br/><label>Source: </label>B-13088 
<br/><br/><label>LCCN: </label>86022128  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Very large scale integration--Design and construction--Textbooks.
<br/><br/><label>LC Class. No.: </label>TK7874  / .J33 1988