Elliott, D. J. <br/><br/>
Integrated circuit fabrication technology / by    print resource 
David J. Elliott. 
 - 2nd ed. 
 - New York :  McGraw-Hill,  1989. 
 - xvi, 540 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographies and index. 
<br/><br/><label>ISBN: </label>0070193398 
<br/><br/><label>LCCN: </label>88032022 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Design and construction.
<br/><br/><label>LC Class. No.: </label>TK7874  / .E44 1989