Entry Meeting Name

Number of records used in: 1

001 - CONTROL NUMBER

• control field: 6664

003 - CONTROL NUMBER IDENTIFIER

• control field: FUTML

005 - DATE AND TIME OF LATEST TRANSACTION

• control field: 20170405105904.0

008 - FIXED-LENGTH DATA ELEMENTS

• fixed length control field: 170405|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

• Original cataloging agency: FUTML
• Transcribing agency: FUTML

111 ## - HEADING--MEETING NAME

• Meeting name or jurisdiction name as entry element: Symposium on Semiconductor Processing
• Number of part/section/meeting: (4th :
• Date of meeting: 1986 :
• Location of meeting: San Jose, Calif.)

670 ## - SOURCE DATA FOUND

• Source citation: Work cat.: (FUTML)0: Emerging semiconductor technology :, c1987.