Jaeger, Richard C.

Introduction to microelectronic fabrication / by Richard C. Jaeger.- - Reading, Mass. : Addison-Wesley Pub. Co., c1988. - xiii, 232 p. : ill. ; 24 cm. - Modular series on solid state devices ; v. 5 .

Includes bibliographical references and index.

0201146959 : $15.95

B-13088

86022128


Integrated circuits--Very large scale integration--Design and construction--Textbooks.

TK7874 / .J33 1988