Emerging semiconductor technology : a symposium /
sponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors.
- Philadelphia, PA : American Society for Testing and Materials, c1987.
- 704 p. : ill. ; 24 cm.
- ASTM special technical publication ; 960 .
Papers presented at the Fourth International Symposium on Semiconductor Processing. "ASTM publication code number (PCN) 04-960000-46."
Includes bibliographies and indexes.
0803104596
B-12035
86028761
Semiconductor industry--Congresses.
Semiconductors--Design and construction--Congresses.
TK7871.85 / .E47 1987
Papers presented at the Fourth International Symposium on Semiconductor Processing. "ASTM publication code number (PCN) 04-960000-46."
Includes bibliographies and indexes.
0803104596
B-12035
86028761
Semiconductor industry--Congresses.
Semiconductors--Design and construction--Congresses.
TK7871.85 / .E47 1987