Emerging semiconductor technology : a symposium / sponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors. - Philadelphia, PA : American Society for Testing and Materials, c1987. - 704 p. : ill. ; 24 cm. - ASTM special technical publication ; 960 .

Papers presented at the Fourth International Symposium on Semiconductor Processing. "ASTM publication code number (PCN) 04-960000-46."

Includes bibliographies and indexes.

0803104596

B-12035

86028761


Semiconductor industry--Congresses.
Semiconductors--Design and construction--Congresses.

TK7871.85 / .E47 1987